|
JAIST Repository >
School of Materials Science >
Articles >
Journal Articles >
Please use this identifier to cite or link to this item:
http://hdl.handle.net/10119/11938
|
| Title: | Raman spectral analysis of Si films solid-phase-crystallized on glass substrates using pulse laser with crystallization-induction layers of yttria-stabilized zirconia |
| Authors: | Mai, Thi Kieu Lien
Horita, Susumu |
| Issue Date: | 2014-02-06 |
| Publisher: | IOP Publishing |
| Magazine name: | Japanese Journal of Applied Physics |
| Volume: | 53 |
| Number: | 3S1 |
| Start page: | 03CB01-1 |
| End page: | 03CB01-7 |
| DOI: | 10.7567/JJAP.53.03CB01 |
| Abstract: | The solid-phase crystallization of amorphous Si films with/without a crystallization-induction (CI) layer of yttria-stabilized zirconia (YSZ) was performed using a Nd:YAG pulse laser. We investigated the crystallinity of the Si films by Raman spectroscopy. It was found that, at the same crystalline fraction, the FWHM of the c-Si peak for Si/YSZ/glass was smaller than that for Si/glass. The result is considered owing to the CI effect of the YSZ layer. This was confirmed by scanning electron microscopy observation, which showed that the grain size of Si on YSZ layers was more uniform than that on glass substrates. On the other hand, at a lower beam energy, the crystalline quality of the Si films was found to be better although the increase in the crystallization rate with the pulse number N is smaller. On the basis of the above results, the crystallization model of an a-Si film on a YSZ layer is speculated. |
| Rights: | This is the author's version of the work. It is posted here by permission of The Japan Society of Applied Physics. Copyright (C) 2014 The Japan Society of Applied Physics. Mai Thi Kieu Lien and Susumu Horita, Japanese Journal of Applied Physics, 53(3S1), 2014, 03CB01-1-03CB01-7. http://dx.doi.org/10.7567/JJAP.53.03CB01 |
| URI: | http://hdl.handle.net/10119/11938 |
| Material Type: | author |
| Appears in Collections: | c10-1. 雑誌掲載論文 (Journal Articles)
|
Files in This Item:
| File |
Description |
Size | Format |
|---|
| jjap_53_3S1_03CB01_final.pdf | | 1146Kb | Adobe PDF | View/Open |
|
All items in DSpace are protected by copyright, with all rights reserved.
|
