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https://hdl.handle.net/10119/12987
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| Title: | Self-organized metallic islands on nano-patterned silicon substrate |
| Authors: | Agnus, G.
Maroutian, T.
Fleurence, A.
Bartenlian, B.
Hanbucken, M.
Beauvillain, P. |
| Keywords: | Gold
Surface patterning
Nucleation |
| Issue Date: | 2013-09-20 |
| Publisher: | American Institute of Physics |
| Magazine name: | Applied Physics Letters |
| Volume: | 103 |
| Number: | 12 |
| Start page: | 123117-1 |
| End page: | 123117-4 |
| DOI: | 10.1063/1.4821646 |
| Abstract: | Combining the self-organized growth of nanometer size islands with the use of a pre-patterned substrate, the fabrication of a metallic nanoparticle array with sub-100 nm period is demonstrated. The array pattern is artificially defined through conventional lithography on a Si substrate. Two passivation steps are used first ex situ with a wet hydrogenation followed by the in situ formation under ultrahigh vacuum of an Au-Si wetting layer. This allows for the subsequent nucleation and growth of Au on an atomically clean surface. The long range order of the nanoparticle array is preserved over the whole millimeter-size patterned area. |
| Rights: | Copyright 2013 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in G. Agnus, T. Maroutian, A. Fleurence, B. Bartenlian, M. Hanbucken, P. Beauvillain , Applied Physics Letters, 103(12), 123117 (2013) and may be found at |
| URI: | https://hdl.handle.net/10119/12987 |
| Material Type: | publisher |
| Appears in Collections: | c10-1. 雑誌掲載論文 (Journal Articles)
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| 19981.pdf | | 669Kb | Adobe PDF | View/Open |
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