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http://hdl.handle.net/10119/15361
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| タイトル: | Hybrid cluster precursors of the LaZrO insulator for transistors: lowering the processing temperature |
| 著者: | Zhu, Peixin
Li, Jinwang
Phan, Trong Tue
Inoue, Satoshi
Shimoda, Tatsuya |
| 発行日: | 2018-04-12 |
| 出版者: | Springer Nature |
| 誌名: | Scientific Reports |
| 巻: | 8 |
| 開始ページ: | Article number: 5934 |
| DOI: | 10.1038/s41598-018-24292-4 |
| 抄録: | Solution processing of ternary and multinary amorphous metal oxide insulators at processing temperatures below 250 °C remains challenging. Here, we report that the synthesis of a hybrid cluster structure, where the metal oxide core is coordinated by ligands and the different metal elements are incorporated into one core, is an effective strategy for the low-temperature processing of the ternary LaZrO insulator. Solvothermal treatment at 160–180 °C facilitated the development of a cluster structure. From the cluster precursor, high-performance insulating LaZrO films were obtained at 200 °C under the irradiation of ultraviolet light. The analysis data indicate that the solvothermal treatment led to structural unification of the metal oxide network and facilitated stabilization of the residual organic ingredients in UV annealing, which both contributed to the improved insulating properties of LaZrO. Together with a solution-processed channel, we have been able to fabricate LaZrO-based transistors at 200 °C. Though the channel material has not been optimized, the transistor have showed a low gate leakage current around 10 pA at an operating voltage of 15 V, an on/off ratio of near 10^6, a field-effect saturation mobility of 0.37 cm^2 V^<−1> s^<−1>, a subthreshold swing factor of 0.61 V decade^<−1>. |
| Rights: | Copyright (C) 2018 Authors. Peixin Zhu, Jinwang Li, Phan Trong Tue, Satoshi Inoue, and Tatsuya Shimoda, Scientific Reports, 8, 2018, Article number: 5934. This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/. |
| URI: | http://hdl.handle.net/10119/15361 |
| 資料タイプ: | publisher |
| 出現コレクション: | c10-1. 雑誌掲載論文 (Journal Articles)
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