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Please use this identifier to cite or link to this item: http://hdl.handle.net/10119/15421

Title: Fine-patterning of sol-gel derived PZT film by a novel lift-off process using solution-processed metal oxide as a sacrificial layer
Authors: Trong Tue, Phan
Shimoda, Tatsuya
Takamura, Yuzuru
Keywords: PZT film
In-Zn-O metal oxide
Issue Date: 2016-08-29
Publisher: Elsevier
Magazine name: Ceramics International
Volume: 42
Number: 16
Start page: 18431
End page: 18435
DOI: 10.1016/j.ceramint.2016.08.177
Abstract: Sub-5 µm pattern of sol-gel derived lead-zirconium-titanate (PZT) film with a thickness of 80–390 nm was successfully prepared on Pt(111)/TiOx/SiO_2/Si (100) substrate by a novel lift-off process using solution-processed metal oxides as a sacrificial layer. The process is simply divided into three steps: In-Zn-O (IZO) sacrificial layer spin-coating and patterning, PZT film formation followed by lift-off process. The results suggested that the IZO layer is effective in preventing PZT crystallization because of its thermal stability during PZT post-annealing, and its barrier-effects between the spin-coated PZT precursor and the Pt/TiO_x substrate. Consequently, the micro-pattern of lift-off PZT exhibited better properties than that formed by wet-etching. In particular, the lift-off PZT films possessed better ferroelectric properties, higher break-down voltage, and more well-defined shape than those of films patterned by conventional wet-etching. This lift-off process shows great promise for highly integrated devices due to its fine pattern-ability.
Rights: Copyright (C)2016, Elsevier. Licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International license (CC BY-NC-ND 4.0). [http://creativecommons.org/licenses/by-nc-nd/4.0/] NOTICE: This is the author's version of a work accepted for publication by Elsevier. Phan Trong Tue, Tatsuya Shimoda, and Yuzuru Takamura, Ceramics International, 42(16), 2016, 18431-18435, http://dx.doi.org/10.1016/j.ceramint.2016.08.177
URI: http://hdl.handle.net/10119/15421
Material Type: author
Appears in Collections:c10-1. 雑誌掲載論文 (Journal Articles)

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