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http://hdl.handle.net/10119/19881
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Title: | Automated digital wet-etching for InAs/GaAs semiconductor nanostructure formation |
Authors: | MA, YINGSHU |
Authors(alternative): | ま, えいしゆう |
Keywords: | Digital Wet Etching (DWE) GaAs InAs automatic machine |
Issue Date: | Mar-2025 |
Description: | Supervisor: 赤堀 誠志 先端科学技術研究科 修士 (マテリアルサイセンス) |
Title(English): | Automated digital wet-etching for InAs/GaAs semiconductor nanostructure formation |
Authors(English): | MA, Yingshu |
Language: | eng |
URI: | http://hdl.handle.net/10119/19881 |
Appears in Collections: | M-MS. 2024年度(R06) (Jun.2024 - Mar.2025)
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