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Master of Science（Materials Science） >
R07) (Jun.2025 - Mar.2026 >
Please use this identifier to cite or link to this item:
https://hdl.handle.net/10119/20385
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| Title: | AlGaN/GaNヘテロ構造の電気特性に及ぼすドライエッチングおよびデジタルウェットエッチングの影響 |
| Authors: | 呉, 高方 |
| Authors(alternative): | ご, こうほう |
| Issue Date: | Mar-2026 |
| Description: | Supervisor:鈴木 寿一
先端科学技術研究科
修士(マテリアルサイエンス) |
| Title(English): | Effects of dry and digital-wet etching on electrical properties in AlGaN/GaN heterostructures |
| Authors(English): | WU, GAOFANG |
| Language: | eng |
| URI: | https://hdl.handle.net/10119/20385 |
| Appears in Collections: | M-MS. 2025年度(R07) (Jun.2025 - Mar.2026)
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