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Please use this identifier to cite or link to this item: http://hdl.handle.net/10119/2165

Title: ガリウム砒素を用いたカンチレバーの試作
Authors: 岩田, 展也
Authors(alternative): いわた, のぶや
Keywords: ガリウム砒素,カンチレバー,ファブリケーション
gallium arsenide, cantilever, fabrication
Issue Date: Mar-2004
Description: 
Supervisor:山田 省二
材料科学研究科
博士
Title(English): Microfabrication of Gallium Arsenide Cantilever for Atomic Force Microscope Application
Authors(English): Iwata, Nobuya
URI: http://hdl.handle.net/10119/2165
Appears in Collections:D-MS. 2003年度(H15) (Jun.2003 - Mar.2004)

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