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Please use this identifier to cite or link to this item: http://hdl.handle.net/10119/2166

Title: シリコン/セラミックス複合カンチレバーを用いたAFMプローブ及びガスセンサ作製の研究
Authors: 若山, 貴之
Authors(alternative): わかやま, たかゆき
Keywords: シリコン/セラミックス複合カンチレバー,AFMプローブ,ガスセンサ
Silicon/Ceramic Hybrid Cantilevr, AFM probe, Gas s
Issue Date: Mar-2004
Supervisor:山田 省二
Title(English): Microfabrication of Silicon/Ceramic Hybrid Cantilever for AFM probe and Sensor Applications
Authors(English): Wakayama, Takayuki
URI: http://hdl.handle.net/10119/2166
Appears in Collections:D-MS. 2003年度(H15) (Jun.2003 - Mar.2004)

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