|
JAIST Repository >
JAIST >
Theses >
Master of Science（Materials Science） >
H09) (Jun.1997 - Mar.1998 >
Please use this identifier to cite or link to this item:
http://hdl.handle.net/10119/2529
|
| Title: | パルスレーザ照射した(001)Si基板表面上への低温ホモエピタキシャル成長 |
| Authors: | 巽, 知行 |
| Authors(alternative): | たつみ, ともゆき |
| Keywords: | シリコン、反射高速電子線回折、パルスレーザ、エピタキシャル成長
Si, RHEED, pulse laser, epitaxial growth |
| Issue Date: | Mar-1998 |
| Description: |
Supervisor:堀田 將
材料科学研究科
修士 |
| Title(English): | Low-Temperature Homoepitaxial Growth on a (001)Si SurfaceIrradiated by Pulse Laser |
| Authors(English): | Tatsumi, Tomoyuki |
| URI: | http://hdl.handle.net/10119/2529 |
| Appears in Collections: | M-MS. 1997年度(H09) (Jun.1997 - Mar.1998)
|
Files in This Item:
There are no files associated with this item.
|
All items in DSpace are protected by copyright, with all rights reserved.
|
