JAIST Repository >
Theses >
Master of Science(Materials Science) >
Jun.1997 - Mar.1998 >

Please use this identifier to cite or link to this item: http://hdl.handle.net/10119/2529

Title: パルスレーザ照射した(001)Si基板表面上への低温ホモエピタキシャル成長
Authors: 巽, 知行
Authors(alternative): たつみ, ともゆき
Keywords: シリコン、反射高速電子線回折、パルスレーザ、エピタキシャル成長
Si, RHEED, pulse laser, epitaxial growth
Issue Date: Mar-1998
Supervisor:堀田 將
Title(English): Low-Temperature Homoepitaxial Growth on a (001)Si SurfaceIrradiated by Pulse Laser
Authors(English): Tatsumi, Tomoyuki
URI: http://hdl.handle.net/10119/2529
Appears in Collections:M-MS. 平成09年度 (Jun.1997 - Mar.1998)

Files in This Item:

There are no files associated with this item.

All items in DSpace are protected by copyright, with all rights reserved.


Contact : Library Information Section, Japan Advanced Institute of Science and Technology