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Please use this identifier to cite or link to this item: http://hdl.handle.net/10119/2529

Title: パルスレーザ照射した(001)Si基板表面上への低温ホモエピタキシャル成長
Authors: 巽, 知行
Authors(alternative): たつみ, ともゆき
Keywords: シリコン、反射高速電子線回折、パルスレーザ、エピタキシャル成長
Si, RHEED, pulse laser, epitaxial growth
Issue Date: Mar-1998
Description: 
Supervisor:堀田 將
材料科学研究科
修士
Title(English): Low-Temperature Homoepitaxial Growth on a (001)Si SurfaceIrradiated by Pulse Laser
Authors(English): Tatsumi, Tomoyuki
URI: http://hdl.handle.net/10119/2529
Appears in Collections:M-MS. 平成09年度 (Jun.1997 - Mar.1998)

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