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Please use this identifier to cite or link to this item: https://hdl.handle.net/10119/2891

Title: アンモニアの触媒CVD過程におけるNH、NH_2ラジカルの役割
Authors: 小原, 健太郎
Authors(alternative): おはら, けんたろう
Keywords: 触媒CVD法, レーザ誘起蛍光(LIF)法, NH, NH_2
Catalytic CVD method, laser-induced fluorescence (
Issue Date: Mar-2002
Description: 
Supervisor:梅本 宏信
材料科学研究科
修士
Title(English): The role of NH, NH_2 radicals in Catalytic CVD processes of NH3
Authors(English): Ohara, Kentaro
Language: jpn
URI: https://hdl.handle.net/10119/2891
Appears in Collections:M-MS. 2001年度(H13) (Jun.2001 - Mar.2002)

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