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Please use this identifier to cite or link to this item: http://hdl.handle.net/10119/3220

Title: YSZ((ZrO2)1-x(Y2O3)x)薄膜上へのSi薄膜の低温結晶成長
Authors: 坪田, 康寿
Authors(alternative): つぼた, やすとし
Keywords: YSZ薄膜, 低温poly-Si薄膜, RHEED
YSZ film, low-temperature poly-Si film, RHEED
Issue Date: Mar-2005
Supervisor:堀田 將
Title(English): Low temperature crystallization on Si film on YSZ((ZrO2)1-x(Y2O3)x) film
Authors(English): Tsubota, Yasutoshi
URI: http://hdl.handle.net/10119/3220
Appears in Collections:M-MS. 2004年度(H16) (Jun.2004 - Mar.2005)

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