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http://hdl.handle.net/10119/3220
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Title: | YSZ((ZrO2)1-x(Y2O3)x)薄膜上へのSi薄膜の低温結晶成長 |
Authors: | 坪田, 康寿 |
Authors(alternative): | つぼた, やすとし |
Keywords: | YSZ薄膜, 低温poly-Si薄膜, RHEED YSZ film, low-temperature poly-Si film, RHEED |
Issue Date: | Mar-2005 |
Description: | Supervisor:堀田 將 材料科学研究科 修士 |
Title(English): | Low temperature crystallization on Si film on YSZ((ZrO2)1-x(Y2O3)x) film |
Authors(English): | Tsubota, Yasutoshi |
URI: | http://hdl.handle.net/10119/3220 |
Appears in Collections: | M-MS. 2004年度(H16) (Jun.2004 - Mar.2005)
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