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Master of Science（Materials Science） >
H16) (Jun.2004 - Mar.2005 >
Please use this identifier to cite or link to this item:
https://hdl.handle.net/10119/3220
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| Title: | YSZ((ZrO2)1-x(Y2O3)x)薄膜上へのSi薄膜の低温結晶成長 |
| Authors: | 坪田, 康寿 |
| Authors(alternative): | つぼた, やすとし |
| Keywords: | YSZ薄膜, 低温poly-Si薄膜, RHEED
YSZ film, low-temperature poly-Si film, RHEED |
| Issue Date: | Mar-2005 |
| Description: |
Supervisor:堀田 將
材料科学研究科
修士 |
| Title(English): | Low temperature crystallization on Si film on YSZ((ZrO2)1-x(Y2O3)x) film |
| Authors(English): | Tsubota, Yasutoshi |
| URI: | https://hdl.handle.net/10119/3220 |
| Appears in Collections: | M-MS. 2004年度(H16) (Jun.2004 - Mar.2005)
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