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http://hdl.handle.net/10119/3378
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| タイトル: | Periodic Grain-Boundary Formation in a Poly-Si Thin Film Crystallized by Linearly Polarized Nd: YAG Pulse Laser with an Oblique Incident Angle |
| 著者: | Kaki, H
Horita, S |
| 発行日: | 2005-01 |
| 出版者: | AMERICAN INSTITUTE OF PHYSICS |
| 誌名: | Journal of Applied Physics |
| 巻: | 97 |
| 号: | 1 |
| 開始ページ: | 014904-1 |
| 終了ページ: | 014904-9 |
| DOI: | 10.1063/1.1827915 |
| 抄録: | We investigated the periodic grain-boundary formation in the polycrystalline silicon film crystallized by a linearly polarized Nd:YAG(where YAG is yttrium aluminum garnet) pulse laser with an oblique incident angle θ_i=25°, compared with the normal incident angle θ_i=0. The alignment of the grain boundary was uncontrollable and fluctuated in the case of the oblique incident and large irradiation pulse number while that in the case of the normal incident and large irradiation pulse number whike that in the case of the normal incident was performed stably. It was found that the main cause for its low controllability was the nonphase matching between the periodic surface corrugation of the crystallized silicon film and the periodic temperature profile induced by the laser irradiation. Also, it was found that, in the case of θ_i=25°, the dominant periodic width of the grain boundary depended on the pulse number N. That is, it was around λ/(1+sin θ_i) for small N～_～10 and λ/(l－sin θ_i) for large N ～_～ 100 at the laser wavelength of λ=532 nm. In order to explain this dependence, we proposed a model to take into account the periodic corrugation height proportional to the molten volume of the silicon film, the impediment in interference between the incident beam and diffracted beam on the irradiated surface due to the corrugation height, and the reduction of the liquid surface roughness during melting-crystallization process due to liquid-silicon viscosity. |
| Rights: | Copyright 2005 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Hirokazu Kaki and Susumu Horita, Journal of Applied Physics 97(1), 014904 (2005) and may be found at http://link.aip.org/link/?jap/97/014904. |
| URI: | http://hdl.handle.net/10119/3378 |
| 資料タイプ: | publisher |
| 出現コレクション: | c10-1. 雑誌掲載論文 (Journal Articles)
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