JAIST Repository >
c. マテリアルサイエンス研究科・マテリアルサイエンス系 >
c10. 学術雑誌論文等 >
c10-1. 雑誌掲載論文 >

このアイテムの引用には次の識別子を使用してください: http://hdl.handle.net/10119/4510

タイトル: A Si nanopillar grown on a Si tip by atomic force microscopy in ultrahigh vacuum for a high-quality scanning probe
著者: Arai, Toyoko
Tomitori, Masahiko
発行日: 2005-02-08
出版者: American Institute of Physics
誌名: Applied Physics Letters
巻: 86
号: 7
開始ページ: 073110-1
終了ページ: 073110-3
DOI: 10.1063/1.1866213
抄録: We grow a Si nanopillar on a commercial Si tip on an atomic force microscopy (AFM) cantilever using AFM in ultrahigh vacuum for a high-quality scanning force probe, and observe noncontact-AFM (nc-AFM) images of Si(111)7×7 and Ge deposited Si(111) with the nanopillar. We observe it ex situ by transmission electron microscopy to confirm its growth and crystallinity. The nc-AFM image clearly showed the high performance of the nanopillar as a probe with respect to the spatial resolution, image stability, and reproducibility. This nanopillar growth technique can elongate the lifetime of the cantilever and be applied to other materials.
Rights: Copyright 2005 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in T. Arai and M. Tomitori, Applied Physics Letters, 86(7), 073110 (2005) and may be found at http://link.aip.org/link/?APPLAB/86/073110/1
URI: http://hdl.handle.net/10119/4510
資料タイプ: publisher
出現コレクション:c10-1. 雑誌掲載論文 (Journal Articles)


ファイル 記述 サイズ形式
4125.pdf266KbAdobe PDF見る/開く



お問い合わせ先 : 北陸先端科学技術大学院大学 研究推進課図書館情報係