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Please use this identifier to cite or link to this item: http://hdl.handle.net/10119/8005

Title: Cat-CVD法を用いて作製する薄膜トランジスタの研究
Authors: 西崎, 昭吾
Authors(alternative): にしざき, しょうご
Keywords: 触媒化学気相成長法
Issue Date: Mar-2009
Description: Supervisor:松村英樹 教授
Title(English): Fabrication of a-Si TFTs by Catalytic Chemical Vapor Deposition (Cat-CVD)
Authors(English): Nishizaki, Shogo
Language: jpn
URI: http://hdl.handle.net/10119/8005
Appears in Collections:D-MS. 2008年度(H20) (Jun.2008 - Mar.2009)

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