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Doctor of Philosophy（Materials Science） >
H21) (Jun.2009 - Mar.2010 >
Please use this identifier to cite or link to this item:
http://hdl.handle.net/10119/8873
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| Title: | 化合物半導体多層構造を用いた歪み駆動自己変形プロセスの研究 |
| Authors: | 岩瀬, 比宇麻 |
| Authors(alternative): | いわせ, ひうま |
| Keywords: | Compound semiconductor
Epitaxitial growth
micromachining
Cantilever
MEMS
AFM |
| Issue Date: | Mar-2010 |
| Description: | Supervisor:山田省二
マテリアルサイエンス研究科
博士 |
| Title(English): | Study of strain-driven self-bending process using compound semiconductor multi-layer structures |
| Authors(English): | Iwase, Hiuma |
| Language: | jpn |
| URI: | http://hdl.handle.net/10119/8873 |
| Appears in Collections: | D-MS. 2009年度(H21) (Jun.2009 - Mar.2010)
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