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Please use this identifier to cite or link to this item: http://hdl.handle.net/10119/9599

Title: Multireflection Effect on Formation of Periodic Surface Structure on an Si Film Melting-Crystallized by a Linearly Polarized Nd:YAG Pulse Laser Beam
Authors: Horita, Susumu
Kaki, Hirokazu
Nishioka, Kensuke
Keywords: multireflection
Si film
crystallization
green laser
YAG laser
TFT
Issue Date: 2007
Publisher: The Japan Society of Applied Physics
Magazine name: Japanese Journal of Applied Physics
Volume: 46
Number: 6A
Start page: 3527
End page: 3533
DOI: 10.1143/JJAP.46.3527
Abstract: We investigated the multireflection effect on the formation of a periodic surface structure produced by a linearly polarized Nd:YAG laser beam of 532 nm on an Si film deposited on a glass substrate, as well as on heating rate in the film, compared with an excimer laser beam. From the theoretical calculation results, it was found that the formation of the periodic surface structure and heating rate strongly depended on film thickness or that they were influenced by the multireflection effect. The thickness most effective for forming the periodic surface structure and heating rate was about 60 nm. Furthermore, we attempted to verify the calculation results by carrying out an experiment in which we checked whether the periodic structure was formed on the surface of the melting-crystallized Si films. As a result, the thickness range for producing the periodic surface structure was found to be from 50 to 70 nm, which were larger than the theoretical values of 40 to 60 nm.
Rights: This is the author's version of the work. It is posted here by permission of The Japan Society of Applied Physics. Copyright (C) 2007 The Japan Society of Applied Physics. Susumu Horita, Hirokazu Kaki, and Kensuke Nishioka, Japanese Journal of Applied Physics, 46(6A), 2007, 3527-3533. http://jjap.jsap.jp/link?JJAP/46/3527
URI: http://hdl.handle.net/10119/9599
Material Type: author
Appears in Collections:c10-1. 雑誌掲載論文 (Journal Articles)

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