|
JAIST Repository >
School of Materials Science >
Articles >
Journal Articles >
Please use this identifier to cite or link to this item:
https://hdl.handle.net/10119/9600
|
| Title: | Low Temperature Heteroepitaxial Growth of a New Phase Lead Zirconate Titanate Film on Si Substrate with an Epitaxial (ZrO_2)_<1-x>(Y_2O_3)_x Buffer Layer |
| Authors: | Horita, Susumu
Aikawa, Mami
Naruse, Tetsuya |
| Keywords: | PZT
YSZ
Si
heteroepitaxy
sputtering
monoclinic |
| Issue Date: | 2000 |
| Publisher: | The Japan Society of Applied Physics |
| Magazine name: | Japanese Journal of Applied Physics |
| Volume: | 39 |
| Start page: | 4860 |
| End page: | 4868 |
| DOI: | 10.1143/JJAP.39.4860 |
| Abstract: | We investigated the crystalline and electrical properties of heteroepitaxial lead zirconate titanate (PZT) films grown on Si covered with epitaxial (100) (ZrO_2)_<1-x>(Y_2O_3)_x (YSZ) buffer layers. The PZT films were prepared by reactive sputtering. When the substrate temperature was between 400 and 485°C, we obtained a heteroepitaxial (110) oriented monoclinic PZT (m-PZT) film which was metastable. The lattice parameters were as follows: a=b=0.379 nm, c= 0.521 nm and γ=81.3°. The m-PZT film had a larger oxygen composition ratio O/(Zr+Ti) of 3.2 to 3.8 than the perovskite phase. Although the resistivity of the as-grown m-PZT film was much lower than that of the normal perovskite phase, it was increased by two to five orders of magnitude by a step-annealing process of 300°C for 120 min, 325°C for 120 min and 350°C for 180 min in sequence. From the C?V characteristics of the step-annealed m-PZT/YSZ/Si structure, the relative dielectric constant was estimated to be about 45. |
| Rights: | This is the author's version of the work. It is posted here by permission of The Japan Society of Applied Physics. Copyright (C) 2000 The Japan Society of Applied Physics. |
| URI: | https://hdl.handle.net/10119/9600 |
| Material Type: | author |
| Appears in Collections: | c10-1. 雑誌掲載論文 (Journal Articles)
|
Files in This Item:
| File |
Description |
Size | Format |
|---|
| 529.pdf | | 2613Kb | Adobe PDF | View/Open |
|
All items in DSpace are protected by copyright, with all rights reserved.
|
