JAIST Repository >
School of Materials Science >
Grants-in-aid for Scientific Research Papers >
FY 2012 >

Please use this identifier to cite or link to this item: http://hdl.handle.net/10119/11382

Title: 複合顕微鏡による高温下でのナノ接点・接合形成のその場観察・解析
Other Titles: In-situ observation and analysis of nano contacts and junctions formation at high temperatures by a combined microscope of SEM and SPM
Authors: 富取, 正彦
Authors(alternative): Tomitori, Masahiko
Keywords: ナノコンタクト
Issue Date: 3-Jun-2013
Abstract: 本研究では、2物体の間隔を制御できる走査型プローブ顕微鏡(SPM)を利用し、2つの微小物体を高温状態で接近・接触・溶融合・分離させ、その過程で構築されるナノ接点・接合を観察・解析することを目的とした。超高分解能電界放射走査型電子顕微鏡(SEM)と組み合わせたペンシル型SPM を用い、温度1000℃以上の加熱、接近・接触・溶融合を実現した。この成果は、ナノデバイスの電気的ナノ接点の構築に貢献する。 : The purpose of this study is to observe and analyze nano contacts and junctions, which are fabricated by bringing two small pieces of materials in proximity or in touch at high temperatures using scanning probe microscopy (SPM) techniques; the techniques can control the separation between them on a nano scale. We successfully demonstrated the approaching, contacting and welding between the two pieces, observed by an ultra-high resolution field-emission scanning electron microscope combined with a home-made pencil-type SPM.
Description: 研究種目:挑戦的萌芽研究
研究分野: 表面科学、ナノプローブテクノロジー
科研費の分科・細目: 応用物理学・工学基礎、薄膜・表面界面物性
Language: jpn
URI: http://hdl.handle.net/10119/11382
Appears in Collections:2012年度 (FY 2012)

Files in This Item:

File Description SizeFormat
22656012seika.pdf328KbAdobe PDFView/Open

All items in DSpace are protected by copyright, with all rights reserved.


Contact : Library Information Section, Japan Advanced Institute of Science and Technology