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Please use this identifier to cite or link to this item: http://hdl.handle.net/10119/12278

Title: Rheology Printing for Metal-Oxide Patterns and Devices
Authors: Kaneda, Toshihiko
Hirose, Daisuke
Miyasako, Takaaki
Tue, Phan Trong
Murakami, Yoshitaka
Kohara, Shinji
Li, Jinwang
Mitani, Tadaoki
Tokumitsu, Eisuke
Shimoda, Tatsuya
Issue Date: 2013-11-01
Publisher: Royal Society of Chemistry
Magazine name: Journal of Materials Chemistry C
Volume: 2
Number: 1
Start page: 40
End page: 49
DOI: 10.1039/C3TC31842G
Abstract: Technologies of device printing have been widely explored, but existing printing techniques still cannot produce well-defined patterns required by fine electronic devices. Here, a new printing method is proposed and the printing of metal-oxide patterns with well-defined shapes was demonstrated. Excellent thin-film transistors with channel lengths around 500 nm were completely printed by this method in an air atmosphere. This printing utilizes a viscoelastic transformation of the precursor gel when imprinted; it softens at a certain temperature during thermal-imprinting so that the gel can be rheologically imprinted. The imprinted pattern shows very small shrinkage during post-annealing, thereby achieving a high shape fidelity to the mould; this results from metal-oxide condensation at imprinting. The viscoelastic transformation and metal-oxide condensation at imprinting constitute the basis for this printing method, which is closely related to the cluster structure in the precursor gel. This method has worked for patterns down to several tens of nanometers.
Rights: Copyright (C) 2013 Royal Society of Chemistry. Toshihiko Kaneda, Daisuke Hirose, Takaaki Miyasako, Phan Trong Tue, Yoshitaka Murakami, Shinji Kohara, Jinwang Li, Tadaoki Mitani, Eisuke Tokumitsu, and Tatsuya Shimoda, Journal of Materials Chemistry C, 2(1), 2013, 40-49. http://dx.doi.org/10.1039/C3TC31842G - Reproduced by permission of The Royal Society of Chemistry
URI: http://hdl.handle.net/10119/12278
Material Type: author
Appears in Collections:z8-10-1. 雑誌掲載論文 (Journal Articles)

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