|
|
JAIST Repository >
c. マテリアルサイエンス研究科・マテリアルサイエンス系 >
c10. 学術雑誌論文等 >
c10-1. 雑誌掲載論文 >
このアイテムの引用には次の識別子を使用してください:
http://hdl.handle.net/10119/4968
|
| タイトル: | Growth process of cubic boron nitride films in bias sputter deposition |
| 著者: | Yamada, Yukiko
Tatebayashi, Yoshinao
Tsuda, Osamu
Yoshida, Toyonobu |
| 発行日: | 1997-02-28 |
| 出版者: | Elsevier |
| 誌名: | Thin Solid Films |
| 巻: | 295 |
| 号: | 1-2 |
| 開始ページ: | 137 |
| 終了ページ: | 141 |
| DOI: | 10.1016/S0040-6090(96)09285-1 |
| 抄録: | Intending to study phase evolution of cubic boron nitride (cBN) films during RF bias sputter deposition, surfaces of the cBN films in different growth stages were examined systematically. Argon content at the film surface increased during the deposition of initial sp^2 bonded layer growth, and saturated at about 1.5 at.%, and remained constant after the formation and growth of cubic phase, accompanied with an increase of compressive stress up to 5 GPa. This increase of stress is confirmed to be the result of averaging film stress over the double-layered cBN film, that is, over low-stressed initial layer and high-stressed cubic layer. Atomic force microscope (AFM) observations in tapping mode revealed self-affine fractal nature and kinetic roughening of film surface during the growth, and root mean square (rms) roughness changed from 0.3 nm of an initial layer, to 0.9 nm accompanied with peculiar surface smoothing at the initial stage of cBN formation. Moreover, the evolution of the surface roughness was clearly characterized by the change of modes in each growth process, that is, an initial layer growth stage, a transition stage, and a cubic layer growth stage. |
| Rights: | NOTICE: This is the author's version of a work accepted for publication by Elsevier. Yukiko Yamada, Yoshinao Tatebayashi, Osamu Tsuda and Toyonobu Yoshida, Thin Solid Films, 295(1-2), 1997, 137-141, http://dx.doi.org/10.1016/S0040-6090(96)09285-1 |
| URI: | http://hdl.handle.net/10119/4968 |
| 資料タイプ: | author |
| 出現コレクション: | c10-1. 雑誌掲載論文 (Journal Articles)
|
このアイテムのファイル:
| ファイル |
記述 |
サイズ | 形式 |
|---|
| C10032.pdf | | 253Kb | Adobe PDF | 見る/開く |
|
当システムに保管されているアイテムはすべて著作権により保護されています。
|
