|
|
JAIST Repository >
c. マテリアルサイエンス研究科・マテリアルサイエンス系 >
c10. 学術雑誌論文等 >
c10-1. 雑誌掲載論文 >
このアイテムの引用には次の識別子を使用してください:
http://hdl.handle.net/10119/8167
|
| タイトル: | Precursor Cat-CVD a-Si films for the formation of high-quality poly-Si films on glass substrates by flash lamp annealing |
| 著者: | Ohdaira, Keisuke
Shiba, Kazuhiro
Takemoto, Hiroyuki
Fujiwara, Tomoko
Endo, Yohei
Nishizaki, Shogo
Jang, Young Rae
Matsumura, Hideki |
| キーワード: | Catalytic CVD
Flash lamp annealing
Polycrystalline Si
Hydrogen content
Dehydrogenation
Glass substrate
Adhesion
Plasma-enhanced CVD |
| 発行日: | 2009-04-30 |
| 出版者: | Elsevier |
| 誌名: | Thin Solid Films |
| 巻: | 517 |
| 号: | 12 |
| 開始ページ: | 3472 |
| 終了ページ: | 3475 |
| DOI: | 10.1016/j.tsf.2009.01.075 |
| 抄録: | Amorphous Si (a-Si) films with lower hydrogen contents show better adhesion to glass during flash lamp annealing (FLA). The 2.0-μm-thick a-Si films deposited by plasma-enhanced chemical vapor deposition (PECVD), containing 10% hydrogen, start to peel off even at a lamp irradiance lower than that required for crystallization, whereas a-Si films deposited by catalytic CVD (Cat-CVD) partially adhere even after crystallization. Dehydrogenated Cat-CVD a-Si films show much better adhesion to glass, and are converted to polycrystalline Si (poly-Si) without serious peeling, but are accompanied by the generation of crack-like structures. These facts demonstrate the superiority of as-deposited Cat-CVD a-Si films as a precursor material for micrometer-thick poly-Si formed by FLA. |
| Rights: | NOTICE: This is the author's version of a work accepted for publication by Elsevier. Keisuke Ohdaira, Kazuhiro Shiba, Hiroyuki Takemoto, Tomoko Fujiwara, Yohei Endo, Shogo Nishizaki, Young Rae Jang, and Hideki Matsumura, Thin Solid Films, 517(12), 2009, 3472-3475, http://dx.doi.org/10.1016/j.tsf.2009.01.075 |
| URI: | http://hdl.handle.net/10119/8167 |
| 資料タイプ: | author |
| 出現コレクション: | c10-1. 雑誌掲載論文 (Journal Articles)
|
このアイテムのファイル:
| ファイル |
記述 |
サイズ | 形式 |
|---|
| Thin_Solid_Films_517_3472_2009.pdf | | 199Kb | Adobe PDF | 見る/開く |
|
当システムに保管されているアイテムはすべて著作権により保護されています。
|
