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Please use this identifier to cite or link to this item: http://hdl.handle.net/10119/8173

Title: Formation of Several-Micrometer-Thick Polycrystalline Silicon Films on Soda Lime Glass by Flash Lamp Annealing
Authors: Ohdaira, Keisuke
Fujiwara, Tomoko
Endo, Yohei
Nishizaki, Shogo
Matsumura, Hideki
Keywords: soda lime glass
flash lamp annealing
crystallization
amorphous silicon
polycrystalline silicon
solar cell
Issue Date: 2008-11-14
Publisher: The Japan Society of Applied Physics
Magazine name: Japanese Journal of Applied Physics
Volume: 47
Number: 11
Start page: 8239
End page: 8242
DOI: 10.1143/JJAP.47.8239
Abstract: We have succeeded in forming polycrystalline silicon (poly-Si) films with thicknesses of over 4 μm on soda lime glass by flash lamp annealing (FLA) of precursor amorphous Si (a-Si) films deposited by catalytic chemical vapor deposition (Cat-CVD). The insertion of Cr thin films between glass substrates and a-Si significantly improves the adhesion of Si films to the glass substrates, resulting in uniform crystallization of a-Si in 20 × 20 mm^2 area. Several types of substrate, such as quartz substrates, are also used instead of soda lime glass to elucidate the effects of the properties of glass substrates on formation of the poly-Si films. A-Si films tend to be crystallized under lower irradiance than those on quartz glass substrates, which can be described by the lower thermal conductivity and the thermal diffusion length of soda lime glass. Raman spectra of the poly-Si films on soda lime glass show high crystallinity close to unity. The utilization of soda lime glass with poor thermal resistivity is of great importance for the cost-effective mass production of thin-film poly-Si solar cells.
Rights: This is the author's version of the work. It is posted here by permission of The Japan Society of Applied Physics. Copyright (C) 2008 The Japan Society of Applied Physics. Keisuke Ohdaira, Tomoko Fujiwara, Yohei Endo, Shogo Nishizaki, and Hideki Matsumura, Japanese Journal of Applied Physics, 47(11), 2008, 8239-8242. http://jjap.ipap.jp/link?JJAP/47/8239/
URI: http://hdl.handle.net/10119/8173
Material Type: author
Appears in Collections:c10-1. 雑誌掲載論文 (Journal Articles)

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