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Please use this identifier to cite or link to this item: http://hdl.handle.net/10119/9001

Title: Polycrystalline Si films with unique microstructures formed from amorphous Si films by non-thermal equilibrium flash lamp annealing
Authors: Ohdaira, Keisuke
Nishikawa, Takuya
Shiba, Kazuhiro
Takemoto, Hiroyuki
Matsumura, Hideki
Keywords: 62.23.St
68.55.-a
81.10.Jt
81.15.Gh
81.16.Dn
84.60.Jt
Issue Date: 2010-04
Publisher: Wiley
Magazine name: physica status solidi (c)
Volume: 7
Number: 3-4
Start page: 604
End page: 607
DOI: 10.1002/pssc.200982820
Abstract: Flash lamp annealing (FLA), with millisecond-order duration, can crystallize amorphous silicon (a-Si) films a few m thick on glass substrates, resulting in formation of polycrystalline Si (poly-Si) films with unprecedented periodic microstructures. The characteristic microstructure, formed spontaneously during crystallization, consists of large-grain regions, containing relatively large grains more than 100 nm in size, and fine-grain regions, including only 10-nm-sized fine grains. The microstructures results from explosive crystallization (EC), driven by heat generation corresponding to the difference of the enthalpies of meta-stable a-Si and stable crystalline Si (c-Si) states, which realizes lateral crystallization velocity on the order of m/s. The lateral crystallization may stop when the temperature of a-Si in the vicinity of c-Si, which is decided by both homogeneous heating from flash irradiation and thermal diffusion from c-Si, falls below a crystallization temperature. This idea is supported by the experimental fact that a lateral crystallization length decreases with decreasing pulse duration.
Rights: Copyright (C) 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. This is the pre-peer reviewed version of the following article: Keisuke Ohdaira, Takuya Nishikawa, Kazuhiro Shiba, Hiroyuki Takemoto, Hideki Matsumura, physica status solidi (c), 7(3-4), 2010, 604-607. http://dx.doi.org/10.1002/pssc.200982820
URI: http://hdl.handle.net/10119/9001
Material Type: author
Appears in Collections:c10-1. 雑誌掲載論文 (Journal Articles)

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