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Please use this identifier to cite or link to this item: http://hdl.handle.net/10119/10676

Title: Polycrystalline Silicon Films with Nanometer-Sized Dense Fine Grains Formed by Flash-Lamp-Induced Crystallization
Authors: Ohdaira, Keisuke
Ishii, Shohei
Tomura, Naohito
Matsumura, Hideki
Keywords: flash lamp annealing
polycrystalline silicon
thin-film solar cell
nanometer-sized grains
Issue Date: 2012-01-01
Publisher: American Scientific Publishers
Magazine name: Journal of Nanoscience and Nanotechnology
Volume: 12
Number: 1
Start page: 591
End page: 595
DOI: 10.1166/jnn.2012.5342
Abstract: Flash lamp annealing (FLA) with millisecond-order pulse duration can crystallize μm-order-thick a-Si films on glass substrates through explosive crystallization (EC), and flash-lamp-crystallized (FLC) poly-Si films consist of densely-packed nanometer-sized fine grains. We investigate the impact of the hydrogen concentration and the defect density of precursor a-Si films on crystallization mechanism and the microstructures of FLC poly-Si films, by comparing chemical-vapor-deposited (CVD) and sputtered precursor a-Si films. Transmission electron microscopy (TEM) observation reveals that FLC poly-Si films with similar periodic microstructures are formed by the FLA of the two kinds of precursor films, meaning no significant influence of hydrogen atoms and defect density on crystallization mechanism. This high flexibility of the properties of precursor a-Si films would contribute to a wide process window to reproducibly form FLC poly-Si films with the particular periodic microstructures.
Rights: This is the author's version of the work. It is posted here by permission of American Scientific Publishers. Copyright (C) 2012 American Scientific Publishers. Keisuke Ohdaira, Shohei Ishii, Naohito Tomura, and Hideki Matsumura, Journal of Nanoscience and Nanotechnology, 12(1), 2012, 591-595. http://dx.doi.org/10.1166/jnn.2012.5342
URI: http://hdl.handle.net/10119/10676
Material Type: author
Appears in Collections:z8-10-1. 雑誌掲載論文 (Journal Articles)

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