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Please use this identifier to cite or link to this item: http://hdl.handle.net/10119/10882

Title: Liquid-phase explosive crystallization of electron-beam-evaporated a-Si films induced by flash lamp annealing
Authors: Ohdaira, Keisuke
Matsumura, Hideki
Keywords: Liquid phase epitaxy
Semiconducting silicon
Solar cells
X-ray diffraction
Issue Date: 2011-11-25
Publisher: Elsevier
Magazine name: Journal of Crystal Growth
Volume: 362
Start page: 149
End page: 152
DOI: 10.1016/j.jcrysgro.2011.11.028
Abstract: We succeed in the formation of micrometer-order-thick polycrystalline silicon (poly-Si) films through the flash-lamp-induced liquid-phase explosive crystallization (EC) of precursor a-Si films prepared by electron-beam (EB) evaporation. The velocity of the explosive crystallization (v_<EC>) is estimated to be ∼14 m/s, which is close to the velocity of the liquid-phase epitaxy (LPE) of Si at a temperature around the melting point of a-Si of 1418 K. Poly-Si films formed have micrometer-order-long grains stretched along a lateral crystallization direction, and X-ray diffraction (XRD) and electron diffraction pattern measurements reveal that grains in poly-Si films tend to have a particular orientation. These features are significantly different from our previous results: the formation of poly-Si films containing randomly-oriented 10-nm-sized fine grains formed from a-Si films prepared by catalytic chemical vapor deposition (Cat-CVD) or sputtering. One possible reason for the emergence of a different EC mode in EB-evaporated a-Si films is the suppression of solid-phase nucleation (SPN) during Flash Lamp Annealing (FLA) due to tensile stress which precursor a-Si films originally hold. Poly-Si films formed from EB-evaporated a-Si films would contribute to the realization of high-efficiency thin-film poly-Si solar cells because of large and oriented grains.
Rights: NOTICE: This is the author's version of a work accepted for publication by Elsevier. Keisuke Ohdaira, Hideki Matsumura, Journal of Crystal Growth, 362, 2011, 149-152, http://dx.doi.org/10.1016/j.jcrysgro.2011.11.028
URI: http://hdl.handle.net/10119/10882
Material Type: author
Appears in Collections:z8-10-1. 雑誌掲載論文 (Journal Articles)

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