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Items for Author "Nozaki, Yoshitaka"

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Date of IssueTitle Authors
1-Nov-2000 Identification of Si and SiH in catalytic chemical vapor deposition of SiH_4 by laser induced fluorescence spectroscopyNozaki, Yoshitaka; Kongo, Koichi; Miyazaki, Toshihiko; Kitazoe, Makiko; Horii, Katsuhiko; Umemoto, Hironobu; Masuda, Atsushi; Matsumura, Hideki
1-Feb-2002 Direct detection of H atoms in the catalytic chemical vapor deposition of the SiH_4/H_2 systemUmemoto, Hironobu; Ohara, Kentaro; Morita, Daisuke; Nozaki, Yoshitaka; Masuda, Atsushi; Matsumura, Hideki

 
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