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Items for Author "Jain, Puneet"

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Date of IssueTitle Authors
3-Jul-2017 Effect of trichloroethylene enhancement on deposition rate of low-temperature silicon oxide films by silicone oil and ozoneHorita, Susumu; Jain, Puneet
23-Jan-2018 Dependences of deposition rate and OH content on concentration of added trichloroethylene in low-temperature silicon oxide films deposited using silicone oil and ozone gasHorita, Susumu; Jain, Puneet


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