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著者:  "Thi, Trinh Cham"

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3 著者名表示.

発行日タイトル 著者
6-Feb-2012 Passivation characteristics of SiNx/a-Si and SiNx/Si-rich-SiNx stacked layers on crystalline siliconThi, Trinh Cham; Koyama, Koichi; Ohdaira, Keisuke; Matsumura, Hideki
22-Jan-2014 Passivation quality of a stoichiometric SiN_x single passivation layer on crystalline silicon prepared by catalytic chemical vapor deposition and successive annealingThi, Trinh Cham; Koyama, Koichi; Ohdaira, Keisuke; Matsumura, Hideki
22-Jan-2016 Defect termination on crystalline silicon surfaces by hydrogen for improvement in the passivation quality of catalytic chemical vapor-deposited SiN_x and SiN_x/P catalytic-doped layersThi, Trinh Cham; Koyama, Koichi; Ohdaira, Keisuke; Matsumura, Hideki

 


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